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Information card for entry 4120475
Preview
| Coordinates | 4120475.cif |
|---|---|
| Original paper (by DOI) | HTML |
| Formula | C12 H30 N4 W |
|---|---|
| Calculated formula | C12 H30 N4 W |
| Title of publication | Tungsten Nitrido Complexes as Precursors for Low Temperature Chemical Vapor Deposition of WNxCy Films as Diffusion Barriers for Cu Metallization. |
| Authors of publication | McClain, K. Randall; O'Donohue, Christopher; Koley, Arijit; Bonsu, Richard O.; Abboud, Khalil A.; Revelli, Joseph C.; Anderson, Timothy J.; McElwee-White, Lisa |
| Journal of publication | Journal of the American Chemical Society |
| Year of publication | 2014 |
| Journal volume | 136 |
| Journal issue | 4 |
| Pages of publication | 1650 - 1662 |
| a | 8.9854 ± 0.001 Å |
| b | 12.5595 ± 0.0013 Å |
| c | 15.9376 ± 0.0017 Å |
| α | 90° |
| β | 100.712 ± 0.002° |
| γ | 90° |
| Cell volume | 1767.2 ± 0.3 Å3 |
| Cell temperature | 243 ± 2 K |
| Ambient diffraction temperature | 243 ± 2 K |
| Number of distinct elements | 4 |
| Space group number | 14 |
| Hermann-Mauguin space group symbol | P 1 21/n 1 |
| Hall space group symbol | -P 2yn |
| Residual factor for all reflections | 0.0384 |
| Residual factor for significantly intense reflections | 0.026 |
| Weighted residual factors for significantly intense reflections | 0.0656 |
| Weighted residual factors for all reflections included in the refinement | 0.0719 |
| Goodness-of-fit parameter for all reflections included in the refinement | 1.058 |
| Diffraction radiation wavelength | 0.71073 Å |
| Diffraction radiation type | MoKα |
| Has coordinates | Yes |
| Has disorder | Yes |
| Has Fobs | No |
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