Deposition of HfO2 and ZrO2 films by liquid injection MOCVD using new monomeric alkoxide precursors
Authors of publication
Loo, Yim Fun; O'Kane, Ruairi; Jones, Anthony C.; Aspinall, Helen C.; Potter, Richard J.; Chalker, Paul R.; Bickley, Jamie F.; Taylor, Stephen; Smith, Lesley M.
Journal of publication
Journal of Materials Chemistry
Year of publication
2005
Journal volume
15
Journal issue
19
Pages of publication
1896
a
10.2341 ± 0.0004 Å
b
18.9036 ± 0.0008 Å
c
15.6521 ± 0.0006 Å
α
90°
β
105.011 ± 0.001°
γ
90°
Cell volume
2924.7 ± 0.2 Å3
Cell temperature
100 ± 2 K
Ambient diffraction temperature
100 ± 2 K
Number of distinct elements
5
Space group number
14
Hermann-Mauguin space group symbol
P 1 21/n 1
Hall space group symbol
-P 2yn
Residual factor for all reflections
0.0341
Residual factor for significantly intense reflections
0.0277
Weighted residual factors for significantly intense reflections
0.0693
Weighted residual factors for all reflections included in the refinement
0.0719
Goodness-of-fit parameter for all reflections included in the refinement